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DRPS : Course Catalogue : School of Engineering : Postgrad (School of Engineering)

Postgraduate Course: Microfabrication Techniques (PGEE11038)

Course Outline
SchoolSchool of Engineering CollegeCollege of Science and Engineering
Credit level (Normal year taken)SCQF Level 11 (Postgraduate) AvailabilityNot available to visiting students
SCQF Credits10 ECTS Credits5
SummaryThis module will examine the fabrication processes employed in the manufacture of microelectronic devices and microsystems. Initial lectures will cover the well established, industry standard steps used in silicon CMOS technology. The basic science underlying the individual process steps will be presented, along with key aspects of manufacturing and production strategies. Building on this knowledge base, students will study the enabling technologies required for future advanced MEMS devices and microsystems. The lectures will not be exclusive to silicon processing, but will also examine increasingly important areas such as plastic and organic electronic device manufacture. The cleanroom facilities of the Scottish Microelectronics Centre, based at the University of Edinburgh, will allow students a unique, first-hand experience of a diverse microfabrication toolset, providing the ideal backdrop to this MSc course.
Course description The lecture course is split into two segments:

- Segment A: Silicon Integrated Circuit Fabrication Techniques ¿ (1) Processing Overview; (2) Silicon; (3) Layer Formation I; (4) Layer Formation II; (5) Lithography & Patterning I; (6) Lithography & Patterning II; (7) Etching Techniques I; (8) Etching Techniques II; (9) Layer Formation III; (10) Layer Formation IV; (11) Back-end Processing; (12) Test Structures.

- Segment B: MEMS/Microsystems Fabrication Techniques ¿ (13) MEMS Process Integration; (14) 3-D Structure Fabrication; (15) Wafer Bonding; (16) Integrating MEMS with CMOS; (17) Metrology Techniques; (18)MEMS Device Examples.

There may also be guest lectures from industrialists discussing what is involved in design, fabrication and optimisation of microdevices. Depending on class size, we will also have practical demonstrations of some of the microfabrication processes covered in the lectures.
Entry Requirements (not applicable to Visiting Students)
Pre-requisites Co-requisites
Prohibited Combinations Other requirements None
Course Delivery Information
Academic year 2023/24, Not available to visiting students (SS1) Quota:  None
Course Start Semester 2
Timetable Timetable
Learning and Teaching activities (Further Info) Total Hours: 100 ( Lecture Hours 20, Seminar/Tutorial Hours 10, Programme Level Learning and Teaching Hours 2, Directed Learning and Independent Learning Hours 68 )
Assessment (Further Info) Written Exam 100 %, Coursework 0 %, Practical Exam 0 %
Additional Information (Assessment) Examination Only
Feedback Feedback is available in the tutorials and office hours.
No Exam Information
Learning Outcomes
The students will receive an essential overview of the IC and microsystem fabrication industry, and be able to understand: the principles behind the design and fabrication of both semiconductor and MEMs devices and the effect of processes on their performance; a thorough understanding of the available fabrication technologies; a good working knowledge of possible process architectures; an appreciation of the process plant required to enable microfabrication of devices and systems.
Reading List
Recommended Reading

Introduction to Microfabrication by S. Franssila (Wiley)
Fundamentals of Microfabrication by M. Madou (CRC Press)

Additional Texts (more advanced texts for the interested student)

ULSI Technology by C.Y. Chang & S.M. Sze (McGraw-Hill)
CMOS Processing for the VLSI Era by S. Wolf & R.N. Tauber (Lattice)
Fundamental Principles of Optical Lithography by C. Mack (Wiley)
Additional Information
Graduate Attributes and Skills Not entered
KeywordsSilicon Processing,deposition,etching,photolithography,MEMS,Microsystems,microfluidics,more t
Course organiserDr Jonathan Terry
Tel: (0131 6)50 5607
Course secretaryMs Brunori Viola
Tel: (0131 6)50 5687
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