Postgraduate Course: Microfabrication Techniques (PGEE11038)
Course Outline
| School |
School of Engineering |
College |
College of Science and Engineering |
| Course type |
Standard |
Availability |
Not available to visiting students |
| Credit level (Normal year taken) |
SCQF Level 11 (Postgraduate) |
Credits |
10 |
| Home subject area |
Postgrad (School of Engineering) |
Other subject area |
None |
| Course website |
None
|
Taught in Gaelic? |
No |
| Course description |
This module will examine the fabrication processes employed in the manufacture of microelectronic devices and microsystems. Initial lectures will cover the well established, industry standard steps used in silicon CMOS technology. The basic science underlying the individual process steps will be presented, along with key aspects of manufacturing and production strategies. Building on this knowledge base, students will study the enabling technologies required for future advanced MEMS devices and microsystems. The lectures will not be exclusive to silicon processing, but will also examine increasingly important areas such as plastic and organic electronic device manufacture. The cleanroom facilities of the Scottish Microelectronics Centre, based at the University of Edinburgh, will allow students a unique, first-hand experience of a diverse microfabrication toolset, providing the ideal backdrop to this MSc course. |
Entry Requirements
| Pre-requisites |
|
Co-requisites |
|
| Prohibited Combinations |
|
Other requirements |
None
|
| Additional Costs |
None |
Course Delivery Information
|
| Delivery period: 2010/11 Semester 2, Not available to visiting students (SS1)
|
WebCT enabled: Yes |
Quota: None |
| Location |
Activity |
Description |
Weeks |
Monday |
Tuesday |
Wednesday |
Thursday |
Friday |
| King's Buildings | Lecture | | 1-11 | | 10:00 - 10:50 | | | | | King's Buildings | Lecture | | 1-11 | | | | 15:00 - 15:50 | | | King's Buildings | Tutorial | | 1-11 | | | | | 14:00 - 14:50 |
| First Class |
Week 1, Tuesday, 10:00 - 10:50, Zone: King's Buildings. Seminar Rooms D/E, Alrick Building |
| Exam Information |
| Exam Diet |
Paper Name |
Hours:Minutes |
Stationery Requirements |
Comments |
| Main Exam Diet S2 (April/May) | | 2:00 | 16 sides | |
Summary of Intended Learning Outcomes
| The students will receive an essential overview of the IC and microsystem fabrication industry, and be able to understand: the principles behind the design and fabrication of both semiconductor and MEMs devices and the effect of processes on their performance; a thorough understanding of the available fabrication technologies; a good working knowledge of possible process architectures; an appreciation of the process plant required to enable microfabrication of devices and systems. |
Assessment Information
| Examination Only |
Special Arrangements
| None |
Additional Information
| Academic description |
Not entered |
| Syllabus |
Not entered |
| Transferable skills |
Not entered |
| Reading list |
Not entered |
| Study Abroad |
Not entered |
| Study Pattern |
Not entered |
| Keywords |
Silicon Processing, deposition, etching, photolithography, MEMS, Microsystems, microfluidics, biocom |
Contacts
| Course organiser |
Dr Jonathan Terry
Tel:
Email: Jon.Terry@ed.ac.uk |
Course secretary |
Mrs Kim Orsi
Tel: (0131 6)50 5687
Email: Kim.Orsi@ed.ac.uk |
|
copyright 2011 The University of Edinburgh -
31 January 2011 8:05 am
|
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